WL-TCO™ (Next-Generation ITO Target)
PVD Materials Division

WL-TCO™ (Next-Generation ITO Target)

A next-generation ITO target that suppresses particle generation and helps stabilize the deposition process.

Overview

WL-TCO: A Low-Particle ITO Target for Stable and High-Yield Production

WL-TCO is a next-generation ITO target designed to reduce particle generation and etching residues, key challenges associated with conventional ITO targets. By improving film stability and manufacturing yield, it contributes to more reliable production processes. WL-TCO also enables deposition without the introduction of water vapor, providing greater flexibility in process design and operating conditions.

Features and Strengths

  1. Achieves high density through Mitsui Kinzoku’s proprietary MMF and CIP methods

  2. Homogeneous microstructure and high film uniformity

  3. Customizable composition adjustment and property optimization

Application Examples

・High-definition displays
・Smartphones
・Tablets
・Automotive displays
・Optical coatings
・Solar cells

Learn More about WL-TCO (Next Generation ITO Target)

For product case studies or technical consultations, please feel free to contact us.

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